The inline tube PECVD loading and unloading machine is to automatically load wafers from wafer box to PECVD quarts boat or unload them from boat to wafer box.
Benefits：
1. UPH: 6000 pcs/hr;
2. Ultra-low damage rate:≤0.03%;
3. Reserved PL station to accommodate area scan and line scan AOI cameras;
4. softtouch design concept to reduce silicon damage rate
